Surface Chemistry during Atomic Layer Deposition of Pt Studied with Vibrational Sum-Frequency Generation
Vincent Vandalon, Adriaan J. M. Mackus, W. M. M. Kessels
Abstract
saturation coverage decreased significantly with temperature, while the C=C coverage remained constant after precursor chemisorption on the Pt surface for temperatures from 80 to 300 °C. These SFG results have resulted in a better understanding of the Pt ALD process and also highlight the surface chemistry during thin-film growth as a promising field of study for the BB-SFG community.
Topics & Concepts
Atomic layer depositionDeposition (geology)Layer (electronics)Surface (topology)Sum-frequency generationAnalytical Chemistry (journal)ChemistryMaterials scienceAtomic physicsChemical physicsNanotechnologyEnvironmental chemistryPhysicsOpticsGeologyMathematicsGeometryLaserNonlinear opticsPaleontologySedimentSemiconductor materials and devicesMolecular Junctions and NanostructuresAnalytical Chemistry and Sensors