VLSI mask optimization: From shallow to deep learning
Haoyu Yang, Wei Zhong, Yuzhe Ma, Hao Geng, Ran Chen, Wanli Chen, Bei Yu
Topics & Concepts
Design for manufacturabilityVery-large-scale integrationComputer scienceLithographyOptical proximity correctionComputer engineeringArtificial neural networkComputer architectureOptimization problemArtificial intelligenceEngineeringProcess (computing)Embedded systemAlgorithmProgramming languageElectrical engineeringArtVisual artsAdvancements in Photolithography TechniquesIndustrial Vision Systems and Defect DetectionWelding Techniques and Residual Stresses