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Mechanism analysis and process optimization of nanogrinding single-crystal SiC

Jiangnan Xia, Qiusheng Yan, Jisheng Pan, Lijie Wu, Y. Chen, Tao Wang

2024Materials Science in Semiconductor Processing15 citationsDOI

Topics & Concepts

Materials scienceMechanism (biology)Process (computing)CrystallographyComputer scienceOperating systemPhilosophyEpistemologyChemistryAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics
Mechanism analysis and process optimization of nanogrinding single-crystal SiC | Litcius