Mechanism analysis and process optimization of nanogrinding single-crystal SiC
Jiangnan Xia, Qiusheng Yan, Jisheng Pan, Lijie Wu, Y. Chen, Tao Wang
Topics & Concepts
Materials scienceMechanism (biology)Process (computing)CrystallographyComputer scienceOperating systemPhilosophyEpistemologyChemistryAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics