Distributional reinforcement learning for run-to-run control in semiconductor manufacturing processes
Zhu Ma, Tianhong Pan
Topics & Concepts
Reinforcement learningComputer scienceProcess (computing)Controller (irrigation)Compensation (psychology)Stability (learning theory)Action (physics)Markov decision processSemiconductor device fabricationControl (management)Tracking (education)Artificial intelligenceControl theory (sociology)Markov processMachine learningEngineeringMathematicsWaferStatisticsElectrical engineeringBiologyPedagogyPsychologyQuantum mechanicsOperating systemAgronomyPhysicsPsychoanalysisScheduling and Optimization AlgorithmsIndustrial Vision Systems and Defect DetectionReinforcement Learning in Robotics