A novel high efficiency magnetorheological polishing process excited by Halbach array magnetic field
Yuanfan Guo, Shaohui Yin, Hitoshi Ohmori, Min Li, Fengjun Chen, Shuai Huang
Topics & Concepts
PolishingMagnetorheological fluidMaterials scienceMagnetic fieldSurface roughnessChemical-mechanical planarizationExcitationSurface finishComposite materialMechanical engineeringEngineeringElectrical engineeringPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesCharacterization and Applications of Magnetic NanoparticlesForce Microscopy Techniques and Applications