Application of bulk silicon carbide technology in high temperature MEMS sensors
Yanxin Zhai, Haiwang Li, Hanxiao Wu, Zhi Tao, Guoqiang Xu, Xiaoda Cao, Tiantong Xu, Tiantong Xu
Topics & Concepts
Microelectromechanical systemsSilicon carbideMaterials scienceFabricationElectronicsCarbideEngineering physicsNanotechnologyElectrical engineeringComposite materialEngineeringMedicinePathologyAlternative medicineSilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesisDiamond and Carbon-based Materials Research