Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films
Kylie E. Van Meter, Md Istiaque Chowdhury, Mark J. Sowa, Alexander C. Kozen, Tomas Grejtak, Tomas F. Babuska, Nicholas C. Strandwitz, Brandon A. Krick
Topics & Concepts
Materials scienceAtomic layer depositionDeposition (geology)CrystallinityX-ray photoelectron spectroscopyTribometerThin filmCrystalliteLayer (electronics)Composite materialMetallurgyAnalytical Chemistry (journal)Chemical engineeringNanotechnologyTribologyEngineeringSedimentChemistryPaleontologyBiologyChromatographyMetal and Thin Film MechanicsSemiconductor materials and devicesDiamond and Carbon-based Materials Research