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Pressure-assisted direct bonding of copper to silicon nitride for high thermal conductivity and strong interfacial bonding strength

Jiabin Hu, Yajing Wu, Cong Li, Laili Wang, Shenghe Wang, Zhongqi Shi

2021Journal of Materials Science11 citationsDOI

Topics & Concepts

Materials scienceComposite materialFOIL methodThermal conductivitySilicon nitrideLayer (electronics)MicrostructureCopperdBcOxideSiliconMetallurgyOptoelectronicsCMOSAdvanced ceramic materials synthesisAluminum Alloys Composites PropertiesThermal properties of materials
Pressure-assisted direct bonding of copper to silicon nitride for high thermal conductivity and strong interfacial bonding strength | Litcius