Micro-crack defects detection of semiconductor Si-wafers based on Barker code laser infrared thermography
Chiwu Bu, Rui Li, Tao Liu, Runhong Shen, Jun Wang, Qingju Tang
Topics & Concepts
WaferMaterials scienceThermographySemiconductorLaserNondestructive testingInfraredOpticsSemiconductor laser theoryWaveformOptoelectronicsComputer scienceTelecommunicationsPhysicsRadarQuantum mechanicsThermography and Photoacoustic TechniquesLaser Material Processing TechniquesIntegrated Circuits and Semiconductor Failure Analysis