Polishing performance and mechanism of a novel Fe-based slurry for chemical mechanical polishing
Shi-Dong Chen, Hong Lei
Topics & Concepts
PolishingChemical-mechanical planarizationSlurryMechanism (biology)Materials scienceMetallurgyMechanical engineeringComposite materialEngineeringPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesAdvanced materials and compositesMetal Extraction and Bioleaching