Influence of Mo Doping on the Microstructure, Friction, and Wear Properties of CrAlN Films
Yuxing Wang, Yong Woo Ji
Topics & Concepts
Materials scienceMicrostructureNanoindenterX-ray photoelectron spectroscopyDopingSputter depositionScanning electron microscopeEnergy-dispersive X-ray spectroscopyMetallurgyThin filmTransmission electron microscopyComposite materialSputteringNanoindentationNanotechnologyChemical engineeringOptoelectronicsEngineeringMetal and Thin Film MechanicsAdvanced ceramic materials synthesisAdvanced materials and composites