Ultra-high-aspect-ratio structures through silicon using infrared laser pulses focused with axicon-lens doublets
Niladri Ganguly, Pol Sopeña, David Grojo
Abstract
International audience
Topics & Concepts
Materials scienceAxiconFemtosecondOpticsSiliconPicosecondLaserOptoelectronicsLens (geology)WaferSemiconductorPhysicsLaser beamsLaser Material Processing TechniquesLaser-induced spectroscopy and plasmaLaser-Matter Interactions and Applications