Unveiling superior chemical mechanical polishing properties of a novel shell-core structure: Insights from an atomic-scale perspective
Chuandong Chen, Shuaijun Yue, Yang Liu, Hongpeng You
Topics & Concepts
Atomic unitsPerspective (graphical)PolishingMaterials scienceCore (optical fiber)Shell (structure)Scale (ratio)Chemical-mechanical planarizationNanotechnologyComposite materialPhysicsGeometryMathematicsQuantum mechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchElectronic and Structural Properties of Oxides