Environmentally friendly buff cleaning of ceria nanoparticles using bubbles in gas-dissolved water
Pengzhan Liu, Yuna Nam, Sanghuck Jeon, Changmin Kim, Eungchul Kim, Sanghwan Choi, Seung Jae Lee, Sang-Hyeon Park, Seokjun Hong, Taesung Kim, Seokjun Hong, Taesung Kim
Topics & Concepts
SlurryChemical engineeringWaferParticle (ecology)ColloidMaterials scienceChemical-mechanical planarizationNanoparticleDispersion (optics)NanotechnologyPolishingMetallurgyComposite materialOpticsOceanographyGeologyEngineeringPhysicsMinerals Flotation and Separation TechniquesParticle Dynamics in Fluid FlowsFluid Dynamics and Mixing