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High quality of N-polar GaN film fabricated by layer transfer technology using high selective material removal rate of CMP

Zicheng Yu, Li Zhang, Guohao Yu, Xuguang Deng, Chunyu Jiang, Wenxin Tang, Haotian Yin, Weining Liu, Zhang Chen, Baoshun Zhang

2022Materials Science in Semiconductor Processing12 citationsDOI

Topics & Concepts

Materials scienceHillockChemical-mechanical planarizationPhotoluminescenceWaferLayer (electronics)FabricationPolarOptoelectronicsSurface roughnessEtching (microfabrication)PolishingSubstrate (aquarium)NanotechnologyComposite materialPhysicsGeologyAstronomyMedicinePathologyAlternative medicineOceanographyGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsZnO doping and properties
High quality of N-polar GaN film fabricated by layer transfer technology using high selective material removal rate of CMP | Litcius