Superionic fluoride gate dielectrics with low diffusion barrier for two-dimensional electronics
Kui Meng, Zeya Li, Peng Chen, Xingyue Ma, Junwei Huang, Jiayi Li, Feng Qin, Caiyu Qiu, Yilin Zhang, Ding Zhang, Yuhe Deng, Yurong Yang, Genda Gu, Harold Y. Hwang, Qi‐Kun Xue, Yi Cui, Hongtao Yuan
Topics & Concepts
Diffusion barrierDielectricMaterials scienceElectronicsDiffusionOptoelectronicsFluorideNanotechnologyChemistryPhysicsInorganic chemistryPhysical chemistryThermodynamicsLayer (electronics)Electronic and Structural Properties of OxidesSemiconductor materials and devicesGa2O3 and related materials