Enhanced anti-tribocorrosion property of a-C film under high hydrostatic pressure by high power pulsed magnetron sputter (HiPIMS)
Yingrui Liu, Shuyu Li, Xiaohui Zhou, Peng Guo, Rende Chen, Jing Wei, Aiying Wang, Peiling Ke
Abstract
In this study, the amorphous carbon (a-C) films were deposited using HiPIMS and DCMS at same average power. The composition, microstructure and the anti-tribocorrosion property at hydrostatic pressure environment were investigated in detail. The results showed the HiPIMS:a-C film exhibited a higher fraction of sp3 bonding (59 %) compared to DCMS. The increased sp3 fraction led to improved mechanical properties and significantly enhanced the film's capacity loading during sliding. Furthermore, due to the denser structure, the HiPIMS:a-C film demonstrated enhanced localized corrosion resistance at 30 MPa, which can be attributed to its lower defect density. These findings highlight the substantial advantage of HiPIMS in producing high-performance a-C films suitable for harsh deep-sea environments.