A large range compliant XY nano-manipulator with active parasitic rotation rejection
Yijie Liu, Zhen Zhang
Topics & Concepts
Rotation (mathematics)MillimeterControl theory (sociology)Coupling (piping)Computer scienceLinearityTracking (education)Range (aeronautics)Materials sciencePhysicsElectronic engineeringOpticsEngineeringMechanical engineeringArtificial intelligenceControl (management)PsychologyComposite materialPedagogyPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsNanofabrication and Lithography Techniques