Enhanced resistive switching performance of hafnium oxide-based devices: Effects of growth and annealing temperatures
S. P. Swathi, S. Angappane
Topics & Concepts
Materials scienceAnnealing (glass)HafniumOptoelectronicsElectroformingCrystallinitySputter depositionSputteringOxideThin filmNanotechnologyComposite materialMetallurgyLayer (electronics)ZirconiumAdvanced Memory and Neural ComputingFerroelectric and Negative Capacitance DevicesSemiconductor materials and devices