Full-field chromatic confocal microscopy for surface profilometry with sub-micrometer accuracy
Hong-Ruei Chen, Liang-Chia Chen
Topics & Concepts
GalvanometerOpticsProfilometerConfocalMaterials scienceConfocal microscopyMicroscopyMicroscopeAccuracy and precisionComputer scienceSurface finishPhysicsLaserComposite materialQuantum mechanicsOptical measurement and interference techniquesImage Processing Techniques and ApplicationsOptical Coherence Tomography Applications