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The performance limits of hexagonal boron nitride as an insulator for scaled CMOS devices based on two-dimensional materials

Theresia Knobloch, Yu. Yu. Illarionov, Fabian Ducry, Christian Schleich, Stefan Wachter, Kenji Watanabe, Takashi Taniguchi, Thomas Mueller, Michael Waltl, Mario Lanza, M. I. Vexler, Mathieu Luisier, Tibor Grasser

2021Nature Electronics350 citationsDOIOpen Access PDF

Topics & Concepts

Materials scienceNanoelectronicsCMOSInsulator (electricity)SemiconductorTransistorOptoelectronicsMOSFETNanotechnologyVoltageElectrical engineeringEngineering2D Materials and ApplicationsMXene and MAX Phase MaterialsFerroelectric and Negative Capacitance Devices
The performance limits of hexagonal boron nitride as an insulator for scaled CMOS devices based on two-dimensional materials | Litcius