A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites
Zhaoyi Wan, Huazhan Liu, Yuebin Zheng, Yuhua Ma, Kehai Liu, Kehai Liu, Xu Zhou, Chang Liu, Kaihui Liu, Kaihui Liu, Enge Wang
Abstract
Abstract Acoustic devices play an increasingly important role in modern society for information technology and intelligent systems, and recently significant progress has been made in the development of communication, sensing, and energy transduction applications. However, conventional material systems, such as polymers, metals and silicon, show limitations to fulfill the evolving requirements for high‐performance acoustic devices of small size, low power consumption, and multifunctional capabilities. 2D materials hold the promise in overcoming the development bottleneck of acoustic devices aforementioned, given their atomic‐thin thickness, extensive surface area, superior physical properties, and remarkable layer‐stacking tunability. By suspending the 2D materials, mechanical and thermal disruption from substrate will be eliminated, which will enable the development of new classes of acoustic devices with unprecedented sensitivity and accuracy. In this review, the recent progress of acoustic devices based on suspended 2D materials and their composites, especially applications in the audio frequency, static pressure, and ultrasonic frequency range, is briefly summarized, emphasizing the advantageous properties of suspended 2D materials and related outstanding device performance. Together with the development of 2D membrane synthesis, transfer, as well as microelectromechanical fabrication process, suspended 2D materials will shed light on the next‐generation high‐performance acoustic devices.