Multilayer indium saving ITO thin films produced by sputtering method
Leandro Voisin, Makoto Ohtsuka, Svitlana Petrovska, Ruslan Sergiienko, Takashi Nakamura
Topics & Concepts
Indium tin oxideIndiumMaterials scienceThin filmSputteringElectrical resistivity and conductivityTinCrystalliteTransmittanceAnalytical Chemistry (journal)Layer (electronics)OptoelectronicsMetallurgyComposite materialNanotechnologyChemistryElectrical engineeringChromatographyEngineeringZnO doping and propertiesThin-Film Transistor TechnologiesGas Sensing Nanomaterials and Sensors