A novel scheme to measure 2D error motions of linear axes by regulating the direction of a laser interferometer
Soichi Ibaraki, Mashu Hiruya
Topics & Concepts
RetroreflectorInterferometryMeasure (data warehouse)OpticsLaserPath (computing)Optical path lengthPhysicsOptical pathComputer scienceProgramming languageDatabaseAdvanced Measurement and Metrology TechniquesScientific Measurement and Uncertainty EvaluationOptical measurement and interference techniques