Enhancing the piezoelectric performance of nitride thin films through interfacial engineering
Kenji Hirata, Kodai Niitsu, Sri Ayu Anggraini, Taisuke Kageura, Masato Uehara, Hiroshi Yamada, Morito Akiyama
Topics & Concepts
Materials sciencePiezoelectricityNitrideThin filmEngineering physicsNanotechnologyComposite materialOptoelectronicsEngineeringLayer (electronics)Acoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric MaterialsGas Sensing Nanomaterials and Sensors