Origin and Generation Process of a Triangular Single Shockley Stacking Fault Expanding from the Surface Side in 4H-SiC PIN Diodes
Chiharu Ota, Johji Nishio, Aoi Okada, Ryosuke Iijima
Topics & Concepts
Burgers vectorDislocationStacking faultMaterials scienceEpitaxySubstrate (aquarium)DiodeCrystallographyStackingOptoelectronicsTransmission electron microscopyElectroluminescenceOpticsCondensed matter physicsComposite materialChemistryNanotechnologyLayer (electronics)PhysicsNuclear magnetic resonanceGeologyOceanographySilicon Carbide Semiconductor TechnologiesElectromagnetic Compatibility and Noise SuppressionSemiconductor materials and devices