Piezoelectric micropumps: state of the art review
Hamid Asadi Dereshgi, Hüseyin DAL, Mustafa Zahid Yıldız
Topics & Concepts
MicropumpPiezoelectricityActuatorMicroelectromechanical systemsMechanical engineeringField (mathematics)Modeling and simulationComputer scienceSystems engineeringEngineeringMaterials scienceNanotechnologyElectrical engineeringMathematicsPure mathematicsMicrofluidic and Capillary Electrophoresis ApplicationsMicrofluidic and Bio-sensing TechnologiesPiezoelectric Actuators and Control