Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride
Vahid Nasrollahi, Pavel Penchev, Afif Batal, Hoang Le, Stefan Dimov, Kyunghan Kim
Topics & Concepts
TaperingMaterials scienceLaser drillingAspect ratio (aeronautics)DrillingSilicon nitrideLaser beam qualityLaserOpticsBeam (structure)Laser beam machiningBeam diameterSiliconOptoelectronicsMechanical engineeringLaser beamsComputer scienceEngineeringPhysicsMetallurgyComputer graphics (images)Laser Material Processing TechniquesAdvanced Surface Polishing TechniquesAdvanced machining processes and optimization