Litcius/Paper detail

Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride

Vahid Nasrollahi, Pavel Penchev, Afif Batal, Hoang Le, Stefan Dimov, Kyunghan Kim

2020Journal of Materials Processing Technology45 citationsDOIOpen Access PDF

Topics & Concepts

TaperingMaterials scienceLaser drillingAspect ratio (aeronautics)DrillingSilicon nitrideLaser beam qualityLaserOpticsBeam (structure)Laser beam machiningBeam diameterSiliconOptoelectronicsMechanical engineeringLaser beamsComputer scienceEngineeringPhysicsMetallurgyComputer graphics (images)Laser Material Processing TechniquesAdvanced Surface Polishing TechniquesAdvanced machining processes and optimization
Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride | Litcius