Etching of two-dimensional materials
Haibin Sun, Jichen Dong, Fengning Liu, Feng Ding
Topics & Concepts
Etching (microfabrication)Materials scienceCharacterization (materials science)NanotechnologyReactive-ion etchingGrapheneDry etchingIsotropic etchingSubstrate (aquarium)HeterojunctionCrystalliteOptoelectronicsMetallurgyGeologyLayer (electronics)Oceanography2D Materials and ApplicationsGraphene research and applicationsMXene and MAX Phase Materials