Atomic Layer Deposition for Thin Film Solid-State Battery and Capacitor
Dohyun Go, Jeong Woo Shin, Seunghyeon Lee, Jaehyeong Lee, Byung Chan Yang, Yoonjin Won, Munekazu Motoyama, Jihwan An
2022International Journal of Precision Engineering and Manufacturing-Green Technology18 citationsDOI
Topics & Concepts
Atomic layer depositionCapacitorMaterials scienceEnergy storageThin filmNanotechnologyDielectricBattery (electricity)Conformal coatingElectrolyteEngineering physicsRenewable energyOptoelectronicsElectrical engineeringCoatingPower (physics)VoltageEngineeringElectrodeChemistryPhysicsPhysical chemistryQuantum mechanicsSemiconductor materials and devicesAdvancements in Battery MaterialsFerroelectric and Piezoelectric Materials