Impact of thermal-induced sapphire substrate erosion on material and photodetector characteristics of sputtered Ga2O3 films
Hui Li, Shuo‐Huang Yuan, Tsun-Min Huang, Hsuan-Jen Chen, Fu‐Hsing Lu, Sam Zhang, Dong‐Sing Wuu
Topics & Concepts
Materials scienceSapphireCrystallinityAnnealing (glass)SputteringAmorphous solidOptoelectronicsResponsivityThin filmPhotodetectorMonoclinic crystal systemComposite materialOpticsNanotechnologyCrystallographyCrystal structureChemistryLaserPhysicsGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques