Topology optimization of MEMS resonators with target eigenfrequencies and modes
Daniele Giannini, Niels Aage, Francesco Braghin
Topics & Concepts
ResonatorMicroelectromechanical systemsTopology optimizationGyroscopeTopology (electrical circuits)Design for manufacturabilityReduction (mathematics)Proof massVibrationTuning forkSpurious relationshipRange (aeronautics)Electronic engineeringComputer scienceFinite element methodControl theory (sociology)EngineeringMathematicsAcousticsPhysicsMechanical engineeringGeometryStructural engineeringAerospace engineeringElectrical engineeringControl (management)Machine learningQuantum mechanicsArtificial intelligenceTopology Optimization in EngineeringComposite Structure Analysis and OptimizationAdvanced Multi-Objective Optimization Algorithms