Fabrication of 128 × 128 MEMS tunable F-P cavity optical filter array with surface micromachining
Qinghua Meng, Guohua Huang, Jianjun Lai, Dongxin Fan, Kezhi Zhang
Topics & Concepts
Microelectromechanical systemsSurface micromachiningFabricationMaterials scienceBulk micromachiningOptoelectronicsSurface (topology)OpticsPhysicsMedicineMathematicsAlternative medicinePathologyGeometryPhotonic and Optical DevicesSemiconductor Lasers and Optical DevicesAdvanced Fiber Optic Sensors