Selective spatial atomic layer deposition of Cu, Cu2O, and CuO thin films in the open air: reality or fiction?
Abderrahime Sekkat, Matthieu Weber, Jesús López‐Sánchez, Hervé Rabat, Dunpin Hong, Juan Rubio‐Zuazo, Daniel Bellet, Guy Chichignoud, Anne Kaminski‐Cachopo, David Muñoz‐Rojas
Topics & Concepts
CopperMaterials scienceX-ray photoelectron spectroscopyThin filmMicroelectronicsAtomic layer depositionLayer (electronics)Deposition (geology)OptoelectronicsAnalytical Chemistry (journal)Chemical engineeringNanotechnologyMetallurgyChemistryEnvironmental chemistryBiologySedimentEngineeringPaleontologyCopper-based nanomaterials and applicationsZnO doping and propertiesSemiconductor materials and devices