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Machined quality prediction and optimization for micro-EDM drilling of semi-conductive SiC wafer

Hoang-Tien Cao, Jeng-Rong Ho, Pi‐Cheng Tung, Yuan-Ting Lin, Chih-Kuang Lin, Chih-Kuang Lin

2023Materials Science in Semiconductor Processing26 citationsDOI

Topics & Concepts

MachiningElectrical discharge machiningMaterials scienceWaferMean squared errorParticle swarm optimizationArtificial neural networkMechanical engineeringComputer scienceAlgorithmOptoelectronicsMetallurgyMachine learningMathematicsEngineeringStatisticsAdvanced Machining and Optimization TechniquesAdvanced machining processes and optimizationAdvanced Surface Polishing Techniques
Machined quality prediction and optimization for micro-EDM drilling of semi-conductive SiC wafer | Litcius