Integration of high-κ native oxides of gallium for two-dimensional transistors

Kongyang Yi, Wen Qin, Yamin Huang, Yao Wu, Shaopeng Feng, Qiyi Fang, Xun Cao, Ya Deng, Chao Zhu, Xilu Zou, Kah‐Wee Ang, Taotao Li, Xinran Wang, Jun Lou, Keji Lai, Zhili Hu, Zhuhua Zhang, Yemin Dong, Kourosh Kalantar‐Zadeh, Zheng Liu