Wafer-scale nanostructured black silicon with morphology engineering <i>via</i> advanced Sn-assisted dry etching for sensing and solar cell applications
Shaoteng Wu, Qimiao Chen, Lin Zhang, Huixue Ren, Hao Zhou, Liangxing Hu, Chuan Seng Tan
Abstract
Herein, we develop and present a novel CMOS-compatible non-lithography technique to fabricate wafer-scale (6 inches), random textured b-Si with morphology engineering.
Topics & Concepts
Black siliconWaferMaterials scienceEtching (microfabrication)Dry etchingNanotechnologySiliconSolar cellOptoelectronicsMorphology (biology)Scale (ratio)Layer (electronics)PhysicsGeneticsQuantum mechanicsBiologyNanowire Synthesis and ApplicationsThin-Film Transistor TechnologiesPhotonic and Optical Devices