Novel highly-efficient and dress-free polishing technique with plasma-assisted surface modification and dressing
Rongyan Sun, Atsunori Nozoe, Junji Nagahashi, Kenta Arima, Kentaro Kawai, Kazuya Yamamura
Topics & Concepts
PolishingAbrasiveGrindingMaterials scienceSharpeningWaferSlurryMetallurgyPlasmaComposite materialMechanical engineeringNanotechnologyEngineeringPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization