Research on the method of the UV photocatalytic-roll-vibrated composite polishing for silicon carbide ceramic
Yan Gu, Zhuoyi Guo, Faxiang Lu, Jieqiong Lin, Xiuyuan Chen, Xingwang Xu, Zisu Xu, Huibo Zhao
Topics & Concepts
PolishingPhotocatalysisMaterials scienceSilicon carbideComposite numberComposite materialCeramicSurface roughnessChemical-mechanical planarizationMethyl orangeChemistryCatalysisBiochemistryAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesisDiamond and Carbon-based Materials Research