Fabrication of low stress GaN-on-diamond structure via dual-sided diamond film deposition
Jia Xin, Junjun Wei, Yabo Huang, Siwu Shao, Kang An, Yuechan Kong, Jinglong Liu, Liangxian Chen, Chengming Li
Topics & Concepts
Materials scienceDiamondEpitaxyChemical vapor depositionOptoelectronicsLayer (electronics)FabricationMaterial properties of diamondStress relaxationTransmission electron microscopyStress (linguistics)MicrostructureComposite materialNanotechnologyAlternative medicinePhilosophyCreepMedicinePathologyLinguisticsGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsSilicon Carbide Semiconductor Technologies