Electron backscattered diffraction using a new monolithic direct detector: High resolution and fast acquisition
Fulin Wang, McLean P. Echlin, Aidan A. Taylor, Jungho Shin, Benjamin Bammes, Barnaby D.A. Levin, Marc De Graef, Tresa M. Pollock, Daniel S. Gianola
Topics & Concepts
Electron backscatter diffractionDetectorOpticsDiffractionData acquisitionPixelMaterials sciencePhysicsImage resolutionComputer scienceOperating systemAdvanced Electron Microscopy Techniques and ApplicationsElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis