Effect of IGZO thin films fabricated by Pulsed-DC and RF sputtering on TFT characteristics
Jaemin Kim, Jinsu Park, Geonju Yoon, Agrawal Khushabu, Jinseok Kim, Sangwoo Pae, Eun‐Chel Cho, Junsin Yi
Topics & Concepts
Materials scienceThin-film transistorSputteringOptoelectronicsAmorphous solidSputter depositionThin filmPulsed DCHigh-power impulse magnetron sputteringX-ray photoelectron spectroscopyAnalytical Chemistry (journal)Layer (electronics)NanotechnologyNuclear magnetic resonanceOrganic chemistryChromatographyPhysicsChemistryThin-Film Transistor TechnologiesTransition Metal Oxide Nanomaterials