Litcius/Paper detail

Cost-effective technique to fabricate a tubular through-hole anodic aluminum oxide membrane using one-step anodization

Yu-Chin Chien, Huei Chu Weng

2021Microelectronic Engineering19 citationsDOI

Topics & Concepts

AnodizingMaterials scienceMembraneEtching (microfabrication)Isotropic etchingScanning electron microscopeNanotechnologyOxideLayer (electronics)AluminiumComposite materialChemical engineeringMetallurgyChemistryBiochemistryEngineeringAnodic Oxide Films and NanostructuresNanowire Synthesis and ApplicationsSmart Materials for Construction