Hydrogen-free DLC films fabricated using superimposed HiPIMS-DCMS deposition system: Bias voltage effects
Yanjun Chen, Fenghua Su, Haichao Li, Li Qiang, Jianfang Sun, Songsheng Lin
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringTribologyDiamond-like carbonSputter depositionMicrostructureSurface roughnessBiasingComposite materialDeposition (geology)Thin filmSputteringAnalytical Chemistry (journal)VoltageNanotechnologyElectrical engineeringPaleontologyChemistryChromatographyEngineeringBiologySedimentDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsCarbon Nanotubes in Composites