Surface topography measurement of microstructures near the lateral resolution limit via coherence scanning interferometry
Yifeng Sun, Zhishan Gao, Jianqiu Ma, Juntao Zhou, Pengfei Xie, Lingjie Wang, Lihua Lei, Yunxia Fu, Zhenyan Guo, Qun Yuan
Topics & Concepts
OpticsCoherence (philosophical gambling strategy)InterferometryEnvelope (radar)Distortion (music)DiffractionCoherence lengthMaterials sciencePhysicsComputer scienceTelecommunicationsOptoelectronicsAmplifierRadarSuperconductivityQuantum mechanicsCMOSSurface Roughness and Optical MeasurementsOptical measurement and interference techniquesNear-Field Optical Microscopy