Litcius/Paper detail

Refined thermal stability of Cr/Sc multilayers with Si(Be) barrier layers

Е. О. Филатова, Sergei S. Sakhonenkov, Anton Solomonov, R. M. Smertin, В. Н. Полковников

2022Applied Surface Science16 citationsDOI

Topics & Concepts

Materials scienceAmorphous solidX-ray photoelectron spectroscopyScandiumAnnealing (glass)CrystallizationSiliconChromiumTransmission electron microscopyCrystallographyAnalytical Chemistry (journal)NanotechnologyMetallurgyChemistryChemical engineeringEngineeringOrganic chemistryChromatographySemiconductor materials and interfacesIntermetallics and Advanced Alloy PropertiesAdvanced Materials Characterization Techniques