Molecular dynamics study on burr formation mechanism during monocrystalline silicon nano-grinding process
Ziteng Li, Shuhao Kang, Huan Liu, Yuhu Liu, Mingjun Ren, Xinquan Zhang, Li‐Min Zhu, Duo Li
Topics & Concepts
Monocrystalline siliconMaterials scienceGrindingMechanism (biology)Nano-SiliconProcess (computing)Molecular dynamicsNanotechnologyMetallurgyComposite materialComputational chemistryComputer scienceChemistryOperating systemEpistemologyPhilosophyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationNanofabrication and Lithography Techniques