Smoothing surface roughness using Al2O3 atomic layer deposition
Tyler J. Myers, James A. Throckmorton, Rebecca A. Borrelli, Malcolm N. O’Sullivan, T. K. Hatwar, Steven M. George
Topics & Concepts
Surface roughnessMaterials scienceAtomic layer depositionSurface finishWaferSiliconSmoothingOpticsNanometrePolishingRoot mean squareChemical-mechanical planarizationLayer (electronics)OptoelectronicsComposite materialAnalytical Chemistry (journal)ChemistryElectrical engineeringComputer visionEngineeringComputer sciencePhysicsChromatographySemiconductor materials and devicesAdvanced Surface Polishing TechniquesOptical Coatings and Gratings