Theory and molecular simulations of plasma sputtering, transport and deposition processes
Pascal Brault, Anne-Lise Thomann, Marjorie Cavarroc
Topics & Concepts
SputteringMolecular dynamicsMonte Carlo methodKinetic Monte CarloDeposition (geology)PlasmaSputter depositionChemical physicsKinetic energyAtom (system on chip)Materials scienceStatistical physicsThin filmChemistryNanotechnologyPhysicsComputational chemistryComputer scienceNuclear physicsClassical mechanicsSedimentStatisticsMathematicsBiologyEmbedded systemPaleontologyMetal and Thin Film MechanicsSemiconductor materials and devicesIon-surface interactions and analysis