Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching
Sungil Yun, Matthew Tom, Gerassimos Orkoulas, Panagiotis D. Christofides
Topics & Concepts
Etching (microfabrication)Computational fluid dynamicsSubstrate (aquarium)Materials scienceThermalLayer (electronics)Atomic layer depositionDeposition (geology)Kinetic Monte CarloFlow (mathematics)Process (computing)Volumetric flow rateMechanicsMonte Carlo methodMechanical engineeringNanotechnologyComputer scienceEngineeringPhysicsThermodynamicsGeologyStatisticsMathematicsOceanographyOperating systemSedimentBiologyPaleontologySemiconductor materials and devicesPlasma Diagnostics and ApplicationsCopper Interconnects and Reliability